New results on powder blasting techniques applied to the manufacture of piezocomposite structures

We present the last results concerning investigation of powder blasting techniques to micromachined complex-patterned piezoelectric composite transducers. This technology consists of a beam of eroding powder particles, etching an in-situ-masked PZT plate. We manufacture honeycomb-patterned structures, which can not be achieved with a standard saw-dicing technique.


Published in:
Proceedings of the Ultrasonics Symposium, 2, 1115-1118
Presented at:
IEEE Ultrasonics Symposium, Munich, Germany, October 8-11, 2002
Year:
2002
ISBN:
0-7803-7582-3
Laboratories:




 Record created 2005-10-26, last modified 2018-03-17


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