Nano-replication of diffractive optical elements in sol-gel derived glasses
2003
Details
Title
Nano-replication of diffractive optical elements in sol-gel derived glasses
Author(s)
Parashar, V.K. ; Sayah, A. ; Pfeffer, M. ; Schoch, F. ; Gobrecht, J. ; Gijs, M.A.M.
Published in
Microelectronic Engineering
Volume
67-68
Pages
710-719
Date
2003
Other identifier(s)
View record in Web of Science
Laboratories
LMIS2
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > LMIS2 - Microsystems Laboratory 2
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Record creation date
2005-10-26