000055938 001__ 55938
000055938 005__ 20180317094803.0
000055938 0247_ $$2doi$$a10.1016/S0167-9317(03)00132-1
000055938 02470 $$2ISI$$a000183842100098
000055938 037__ $$aARTICLE
000055938 245__ $$aNano-replication of diffractive optical elements in sol-gel derived glasses
000055938 269__ $$a2003
000055938 260__ $$c2003
000055938 336__ $$aJournal Articles
000055938 700__ $$0240574$$aParashar, V.K.$$g145754
000055938 700__ $$0240260$$aSayah, A.$$g110149
000055938 700__ $$aPfeffer, M.
000055938 700__ $$aSchoch, F.
000055938 700__ $$aGobrecht, J.
000055938 700__ $$0242801$$aGijs, M.A.M.$$g113762
000055938 773__ $$j67-68$$q710-719$$tMicroelectronic Engineering
000055938 909CO $$ooai:infoscience.tind.io:55938$$particle$$pSTI
000055938 909C0 $$0252094$$pLMIS2$$xU10322
000055938 937__ $$aLMIS2-ARTICLE-2003-002
000055938 970__ $$a89/LMIS2
000055938 973__ $$aEPFL$$rREVIEWED$$sPUBLISHED
000055938 980__ $$aARTICLE