Diffractive optical elements in titanium oxide for MOEMS applications
2003
Details
Title
Diffractive optical elements in titanium oxide for MOEMS applications
Author(s)
Parashar, V.K. ; Sayah, A. ; Cuche, E. ; Depeursinge, C. ; Gijs, M.A.M.
Published in
TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers
Volume
2
Pages
1482-1485
Conference
TRANSDUCERS ’03, The 12th International Conference on Solid State Sensors, Actuators and Microsystems, Boston, USA, June 8-12, 2003
Date
2003
Other identifier(s)
View record in Web of Science
Laboratories
LMIS2
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > LMIS2 - Microsystems Laboratory 2
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Record creation date
2005-10-26