UV photosensitive elastomer as a new mask for powder blasting microfabrication
2003
Details
Title
UV photosensitive elastomer as a new mask for powder blasting microfabrication
Author(s)
Sayah, A. ; Parashar, V.K. ; Pawlowski, A.G. ; Gijs, M.A.M.
Conference
Techn. Digest Eurosensors XVII, The 17th Europ. Conf. On Solid State Transducers, Guimarães, Portugal, September 21-24
Date
2003
Laboratories
LMIS2
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > LMIS2 - Microsystems Laboratory 2
Conference Papers
Work produced at EPFL
Published
Conference Papers
Work produced at EPFL
Published
Record creation date
2005-10-26