UV photosensitive elastomer as a new mask for powder blasting microfabrication


Presented at:
Techn. Digest Eurosensors XVII, The 17th Europ. Conf. On Solid State Transducers, Guimarães, Portugal, September 21-24
Year:
2003
Laboratories:




 Record created 2005-10-26, last modified 2018-03-17


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