Precision Poly(dimethyl siloxane) masking technology for high-resolution powder blasting
2005
Details
Title
Precision Poly(dimethyl siloxane) masking technology for high-resolution powder blasting
Author(s)
Pawlowski, A.-G. ; Sayah, A. ; Gijs, M.A.M.
Published in
Journal of Microelectromechanical Systems
Volume
14
Issue
3
Pages
619-624
Date
2005
Other identifier(s)
View record in Web of Science
Laboratories
LMIS2
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > LMIS2 - Microsystems Laboratory 2
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Record creation date
2005-10-26