Fabrication process for a microfluidic valve
In this paper, the necessity for a high pressure valve is discussed, and a design for such a valve that has been previously presented is described. This valve can be built using simple fabrication techniques available in microsystem foundries. Its fabrication process is also shown. Finally, a brief description of the expected behaviour of the valve is presented.
Record created on 2005-10-19, modified on 2016-08-08