Fabrication process for a microfluidic valve

In this paper, the necessity for a high pressure valve is discussed, and a design for such a valve that has been previously presented is described. This valve can be built using simple fabrication techniques available in microsystem foundries. Its fabrication process is also shown. Finally, a brief description of the expected behaviour of the valve is presented.


Published in:
Proceedings of the 2003 International Symposium on Circuits and Systems (ISCAS 2003), 4, IV-860 - IV-863
Year:
2003
Laboratories:


Note: The status of this file is: EPFL only


 Record created 2005-10-19, last modified 2018-03-17

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