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Silicon sacrificial layer dry etching (SSLDE) for free-standing RF MEMS architectures
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Silicon sacrificial layer dry etching (SSLDE) for [...]
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Frederico, S.
et al
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2003_MEMS_SSLDE_Etching
version 1
2003_MEMS_SSLDE_Etching
[425.54 KB]
27 Jan 2018, 12:26
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Frederico_MEMS2003
version 1
Frederico_MEMS2003.pdf
[322.69 KB]
27 Jan 2018, 13:00
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