Fabrication process and model for a MEMS parallel-plate capacitor above CPW line
2004
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Title
Fabrication process and model for a MEMS parallel-plate capacitor above CPW line
Author(s)
Perruisseau-Carrier, J. ; Fritschi, R. ; Crespo Valero, P. ; Hibert, C. ; Zürcher, J.-F. ; Flückiger, Ph. ; Skrivervik, A. ; Ionescu, A. M.
Published in
MEMSWAVE 2004, 5th workshop on MEMS for millimeterwave communication
Conference
5th workshop on MEMS for millimeterwave communication (MEMSWAVE2004), Uppsala, Sweden, June 30-July 2, 2004
Date
2004
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > LEMA - Laboratory of ElectroMagnetics and Antennas
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > NANOLAB - Nanoelectronic Devices Laboratory
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > MAG - Microwave and Antenna Group
Scientific production and competences > STI - School of Engineering > STI Archives > MNWAVE - Adaptive Micronano Wave Systems
Scientific production and competences > STI - School of Engineering > CMI - Center of MicroNanoTechnology
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > NANOLAB - Nanoelectronic Devices Laboratory
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > MAG - Microwave and Antenna Group
Scientific production and competences > STI - School of Engineering > STI Archives > MNWAVE - Adaptive Micronano Wave Systems
Scientific production and competences > STI - School of Engineering > CMI - Center of MicroNanoTechnology
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Record creation date
2005-10-19