Fabrication process and model for a MEMS parallel-plate capacitor above CPW line


Published in:
MEMSWAVE 2004, 5th workshop on MEMS for millimeterwave communication
Presented at:
5th workshop on MEMS for millimeterwave communication (MEMSWAVE2004), Uppsala, Sweden, June 30-July 2, 2004
Year:
2004
Laboratories:


Note: The status of this file is: EPFL only


 Record created 2005-10-19, last modified 2018-03-18

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