Monolithic piezoelectric push-pull actuators for inertial drives

In many miniature systems for positioning and especially in microrobotics the assembly of the components becomes difficult. At sizes of systems of a few cm2 not only the assembly becomes more difficult, downscaling also means that single parts become more fragile and individually more difficult to fabricate. We propose a method which allows to integrate several piezoelectric actuators of one or two degrees of freedom within the same bulk material, permitting to fabricate tiny positioning systems and microrobots at a mesoscopic scale. The principle of the actuator is presented, followed by some remarks on dimensioning and fabrication. Finally, some application examples are given.


Published in:
Proceedings of the 2003 IEEE International Symposium on Micromechatronics and Human Science (MHS 2003), 309 - 316
Presented at:
IEEE International Symposium on Micromechatronics and Human Science (MHS 2003), Nagoya, Japan
Year:
2003
Keywords:
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Note: The status of this file is: EPFL only


 Record created 2005-10-13, last modified 2018-01-27

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