Composite photopolymer microstructures: From planar to 3D devices


Published in:
BOSTON TRANSDUCERS'03: DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 991-994
Presented at:
12th International Conference on Solid-State Sensors, Actuators and Microsystems, BOSTON, MASSACHUSETTS, JUN 09-12, 2003
Year:
2003
Laboratories:




 Record created 2005-09-13, last modified 2018-07-07


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