Composite photopolymer microstructures: From planar to 3D devices
2003
Details
Title
Composite photopolymer microstructures: From planar to 3D devices
Author(s)
Renaud, Philippe ; Metz, Stefan ; Jiguet, Sébastien ; Bertsch, Arnaud
Published in
BOSTON TRANSDUCERS'03: DIGEST OF TECHNICAL PAPERS
Volume
2
Pages
991-994
Conference
12th International Conference on Solid-State Sensors, Actuators and Microsystems, BOSTON, MASSACHUSETTS, JUN 09-12, 2003
Date
2003
Other identifier(s)
View record in Web of Science
Laboratories
LMIS4
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > LMIS4 - Microsystems Laboratory 4
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Record creation date
2005-09-13