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MEMS spectrometer for infrared gas analysis based on a tunable filter of porous silicon
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MEMS spectrometer for infrared gas analysis based [...]
-
Lammel, Gerhard
et al
main
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Lammel_Transducers2001_spect
version 1
Lammel_Transducers2001_spect.pdf
[1.1 MB]
27 Jan 2018, 12:23
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