MEMS spectrometer for infrared gas analysis based on a tunable filter of porous silicon

We present a MEMS infrared spectrometer for selective and quantitative chemical gas analysis. It contains a tunable optical filter of porous silicon that allows to measure the infrared absorption of a gas mixture at different wavelengths serially with only one single thermopile detector. This method eliminates drift of the sensor without any reference beam. The filter that measures typically 1.0 x 1.8 mm(2) is tilted by a microactuator to tune it. This wavelength modulation can replace a modulation of the source. Selective sensing of CO2 and CO by their absorption bands at 4.23 mum and 4.65 mum has been shown.


Publié dans:
TRANSUCERS '01: EUROSENSORS XV, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 1, 776-779
Présenté à:
11th International Conference on Solid-State Sensors and Actuators, MUNICH, GERMANY, JUN 10-14, 2001
Année
2001
Laboratoires:


Note: Le statut de ce fichier est: Seulement EPFL


 Notice créée le 2005-09-13, modifiée le 2020-10-24

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