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conference paper

Low cost microspectrometer

Lammel, Gerhard
•
Schweizer, Sandra  
•
Renaud, Philippe  
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2000
MOEMS and Miniaturized Systems
Conference on MOEMS and Miniaturized Systems

We present a tunable interference filter for infrared and visible light that scans the desired part of the optical spectrum within milliseconds. A single pixel detector measures serially the intensity at selected wavelengths. This concept: avoids expensive linear detectors as used for grating spectrometers. The tunable optical interference filter is fabricated by a new porous silicon batch technology using only two photolithography steps. The refractive index of this filter microplate is gradually modulated in depth to create a Bragg mirror or a Fabry-Perot bandpass filter for a transmission wavelength between 400 nm and 6 mum. Two thermal bimorph micro-actuators tilt the plate by up to 90 degrees, changing the incidence angle of the beam to be analyzed. This tunes the wavelength transmitted to the detector by a factor of 1.5, e.g. from 4 mum to 6 mum. The filter area can be chosen between 0.27 mm x 0.70 mm and 2.50 mm x 3.00 mm, its thickness is typically 30 mum The spectral finesse of 25 is sufficient for most diagnosis applications, e. g. detection of CO2 and CO in combustion processes by their IR absorption bands. Online colorimetry and color correction of desktop printers can be envisaged.

  • Details
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Type
conference paper
DOI
10.1117/12.396515
Author(s)
Lammel, Gerhard
Schweizer, Sandra  
Renaud, Philippe  
Motamedi, M. E.
Goring, R.
Date Issued

2000

Published in
MOEMS and Miniaturized Systems
Series title/Series vol.

SPIE Proceedings; 4178

Start page

288

End page

295

Subjects

porous-silicon

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LMIS4  
Event nameEvent placeEvent date
Conference on MOEMS and Miniaturized Systems

SANTA CLARA, CALIFORNIA

SEP 18-20, 2000

Available on Infoscience
September 13, 2005
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/216148
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