Fabrication of photoplastic high-aspect ratio microparts and micromolds using SU-8 UV resist

An innovative method for fabrication and rapid prototyping of high-aspect ratio micromechanical components in photoresist is discussed. The photoresist is an epoxy-negative-tone resist, called SU-8, which can be structured to more than 2 mm in thickness by UV exposure. Small gears of 530 mu m in diameter and 200 mu m in thickness have been realized in this photoplastic and their functionality has been demonstrated. In addition a process called MIMOTEC(TM) (MIcroMOlds TEChnology) has been established for the fabrication of metallic micromolds. MIMOTEC(TM) is based on the use of the SU-8 spun on high thicknesses and electrodeposition of nickel. Thermoplastic microcomponents have been injected and mounted in watches.


Published in:
MICROSYSTEM TECHNOLOGIES, 4, 3, 143-146
Year:
1998
Laboratories:




 Record created 2005-09-13, last modified 2018-07-07


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