Simple and low cost fabrication of embedded microchannels by using a new thick-film photoplastic

In this paper we describe new ways to realise micro-channels. The used technologies are based on a novel thick-film photoplastic, the SU-8. This photoresist has outstanding properties, allowing the realisation of high aspect ratio microstructures. It is a simple and low-cost fabrication process. The micro channels developed in this work it will be used for the realisation of thermal flow-sensors.


Published in:
TRANSDUCERS 97 - 1997 INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS AND ACTUATORS, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 1, 1419-1422
Presented at:
1997 International Conference on Solid-State Sensors and Actuators, CHICAGO, IL, JUN 16-19, 1997
Year:
1997
Laboratories:


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 Record created 2005-09-13, last modified 2018-03-17

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