We discuss both limitations and potentialities of micromechanical devices based on simple microtechnologies. We briefly review flow sensors and their applications. Underlying technologies and prospective applications are discussed.
Title
From simple devices to promising microsystem applications
Published in
1997 21ST INTERNATIONAL CONFERENCE ON MICROELECTRONICS - PROCEEDINGS, VOLS 1 AND 2
Pages
59-62
Conference
21st International Conference on Microelectronics, NISH, YUGOSLAVIA, SEP 14-17, 1997
Date
1997
Record creation date
2005-09-13
