From simple devices to promising microsystem applications

We discuss both limitations and potentialities of micromechanical devices based on simple microtechnologies. We briefly review flow sensors and their applications. Underlying technologies and prospective applications are discussed.


Published in:
1997 21ST INTERNATIONAL CONFERENCE ON MICROELECTRONICS - PROCEEDINGS, VOLS 1 AND 2, 59-62
Presented at:
21st International Conference on Microelectronics, NISH, YUGOSLAVIA, SEP 14-17, 1997
Year:
1997
Laboratories:


Note: The status of this file is: EPFL only


 Record created 2005-09-13, last modified 2018-03-17

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