Piezoelectric cantilever beams actuated by PZT sol-gel thin film

The mechanical response of piezoelectric cantilever beams actuated by sol-gel- derived lead zirconium titanate (PZT) thin film is reported. Small multilayered beams are used to analyse the converse piezoelectric effect and to measure the mechanical deflection of the beams with a standard interferometry method. Interferometric displacement measurements, electrical measurements and finite- element simulations are reported to determine the piezoelectric coefficient d(31) of the PZT thin film.


Published in:
SENSORS AND ACTUATORS A-PHYSICAL, 54, 1-3, 530-535
Year:
1996
Note:
154
Laboratories:


Note: The status of this file is: EPFL only


 Record created 2005-09-13, last modified 2018-03-18

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