High Resolution Backside Thermography using a Numerical Aperture Increasing Lens
2003
Details
Title
High Resolution Backside Thermography using a Numerical Aperture Increasing Lens
Author(s)
Thorne, S. ; Ippolito, S. ; Eraslan, M. ; Goldberg, B. ; Ünlü, M. S. ; Leblebici, Y.
Published in
ISTFA 2003: Conference Proceedings from the 29th International Symposium for Testing and Failure Analysis
Pages
14-17
Conference
29th International Symposium for Testing and Failure Analysis, Santa Clara, CA, 2-6 November 2003
Date
2003
Laboratories
LSM
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > LSM - Microelectronic Systems Laboratory
Conference Papers
Work produced at EPFL
Published
Conference Papers
Work produced at EPFL
Published
Record creation date
2005-08-30