000050232 001__ 50232
000050232 005__ 20181007230933.0
000050232 0247_ $$2doi$$a10.5075/epfl-thesis-3281
000050232 02470 $$2urn$$aurn:nbn:ch:bel-epfl-thesis3281-6
000050232 02471 $$2nebis$$a4949898
000050232 037__ $$aTHESIS_LIB
000050232 041__ $$afre
000050232 088__ $$a3281
000050232 245__ $$aContribution à l'accroissement des performances du processus de µEDM par l'utilisation d'un robot à dynamique élevée et de haute précision
000050232 269__ $$a2005
000050232 260__ $$aLausanne$$bEPFL$$c2005
000050232 300__ $$a142
000050232 336__ $$aTheses
000050232 502__ $$aIvano Beltrami, Hannes Bleuler, Jacques Jacot, Hans Langen
000050232 520__ $$aElectro Discharge Machining (EDM) is an attractive subtractive method for complex 3d structurization of hard and very hard conductive and semi-conductive materials. The machining capabilities of a material do not depend on its hardness but on its electric conductibility and its melting point. The absence of any mechanical interaction between tool (the electrode) and machined part makes the electroerosion a well-adapted process for micro-structurization. In the passage from the macro to the micro-electroerosion (µEDM), some of the elements of the machine have to be adapted in order to improve the performances and to obtain accurate movements. The goal is to manufacture millimeters-sized shapes with an accuracy of a hundred of nanometers. This thesis deals the problem of the µEDM with a three degrees of freedom (DOF) mechanism, based on a parallel kinematics and flexure joints (the Delta3 robot). In addition to its high accuracy (5 nm) and high bandwidth (500 Hz), the Delta3 robot has the particularity of being free of backlash, wear and stick-slip phenomena. These performances have allowed to verify the importance of the time constants in the servo loop of the process, by many experiences of micro-drilling. Simulations have demonstrated the advantages brought by the dynamic, in the improvement of the µEDM process. Bad flushing conditions and very small gaps (<10 µm), generate elevated gradients of contamination, to which the frequency response of the machine must be adapted. Simulations have shown that the balance between the material removal rate and the evacuation rate can be improved by adjusting the electrode-part distance at a frequency of a few hundreds of hertz. These back and forth movements have to be fast and accurate: first, to adjust quickly and precisely the breaking voltage distance and second, to guarantee a good machining accuracy. An industrial version of the prototype finalized during this thesis will be commercialized soon by AGIE (the company that supported this work).
000050232 6531_ $$aµEDM
000050232 6531_ $$amicro-EDM
000050232 6531_ $$aElectro Discharge Machining
000050232 6531_ $$a3D micro-structurization
000050232 6531_ $$amicrofactory
000050232 6531_ $$ananofactory
000050232 6531_ $$arapid prototyping
000050232 6531_ $$ananotechnology
000050232 6531_ $$aµEDM
000050232 6531_ $$amicro-EDM
000050232 6531_ $$amicro-électroérosion
000050232 6531_ $$amicro-érosion
000050232 6531_ $$amicro-usinage
000050232 6531_ $$amicro-perçage
000050232 6531_ $$ananotechnologie
000050232 700__ $$0(EPFLAUTH)112993$$aJoseph, Cédric$$g112993
000050232 720_2 $$0242132$$aClavel, Reymond$$edir.$$g104789
000050232 8564_ $$s4370162$$uhttps://infoscience.epfl.ch/record/50232/files/EPFL_TH3281.pdf$$yTexte intégral / Full text$$zTexte intégral / Full text
000050232 909C0 $$0252016$$pLSRO
000050232 909CO $$ooai:infoscience.tind.io:50232$$pthesis$$pSTI$$pDOI$$qDOI2$$qthesis-bn2018
000050232 918__ $$aSTI$$bSTI-SMT$$cIPR
000050232 919__ $$aLSRO2
000050232 919__ $$aLSRO2
000050232 920__ $$a2005-7-8$$b2005
000050232 970__ $$a3281/THESES
000050232 973__ $$aEPFL$$sPUBLISHED
000050232 980__ $$aTHESIS