Etude des plasmas organosiliciés dilués en oxygène utilisés pour la déposition d'oxyde de silicium
2001
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Title
Etude des plasmas organosiliciés dilués en oxygène utilisés pour la déposition d'oxyde de silicium
Author(s)
Magni, David
Advisor(s)
Pagination
178
Date
2001
Publisher
Lausanne, EPFL
Language
French
Laboratories
CRPP
SPC
SPC
Record Appears in
Scientific production and competences > SB - School of Basic Sciences > SPC - Swiss Plasma Center > SPC - Swiss Plasma Center
Scientific production and competences > EPFL Theses
Work produced at EPFL
Published
Theses
Scientific production and competences > EPFL Theses
Work produced at EPFL
Published
Theses
Record creation date
2005-03-16