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Title
New micromachining technologies using porous silicon
Author(s)
Lammel, Gerhard
Advisor(s)
Pagination
153
Date
2001
Publisher
Lausanne, EPFL
Language
English
Laboratories
LMIS4
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > LMIS4 - Microsystems Laboratory 4
Scientific production and competences > EPFL Theses
Work produced at EPFL
Published
Theses
Scientific production and competences > EPFL Theses
Work produced at EPFL
Published
Theses
Record creation date
2005-03-16