Thermally actuated micro-mirror for one and two-dimensional optical beam scanning
Schweizer, Sandra
2001
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Title Thermally actuated micro-mirror for one and two-dimensional optical beam scanning
Author(s) Schweizer, Sandra
Advisor(s)
Pagination 173
Date 2001
Publisher Lausanne, EPFL
DOI 10.5075/epfl-thesis-2359
Laboratories LMIS4
Record Appears in Scientific production and competences > STI - School of Engineering > IMT - Institute of Microengineering > LMIS4 - Microsystems Laboratory 4
Scientific production and competences > EPFL Theses
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