Infoscience

Thesis

High resolution lithography based on deep ultra-violet total-internal-reflection holography using surface-relief techniques

    Thèse École polytechnique fédérale de Lausanne EPFL, n° 1987 (1999)
    Faculté des sciences et techniques de l'ingénieur
    Jury: Hannes Bleuler, René Daendliker, Ian N. Ross, René Salathé, Hans J. Tiziani

    Public defense: 1999-6-11

    Reference

    Record created on 2005-03-16, modified on 2016-08-08

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