Epitaxy and characterization of Si1-x-yGexCy alloy layers grown on (100) Si by rapid thermal chemical vapor deposition
1995
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Title
Epitaxy and characterization of Si1-x-yGexCy alloy layers grown on (100) Si by rapid thermal chemical vapor deposition
Author(s)
Mi, Jian
Advisor(s)
Pagination
141
Date
1995
Publisher
Lausanne, EPFL
Language
English
Record Appears in
Scientific production and competences > EPFL Theses
Work produced at EPFL
Published
Theses
Work produced at EPFL
Published
Theses
Record creation date
2005-03-16