Actuation bandwidth extension of an integrated piezo-optomechanical nanophotonic device
Siddharth, Anat; Weng, Wenle; Lihachev, Grigory; Riemensberger, Johann; Tian, Hao; Liu, Junqiu; Bhave, Sunil A.; Kippenberg, Tobias J.
2021

Abstract

We demonstrate a novel technique of contour-mode suppression of an integrated MEMS-photonic chip up to the first HBAR mode at 17 MHz. The flattened actuation response is critical to the development of compact LiDAR engine or low-noise frequency-agile laser. (c) 2021TheAuthor(s)

Details

Title Actuation bandwidth extension of an integrated piezo-optomechanical nanophotonic device
Author(s) Siddharth, Anat ; Weng, Wenle ; Lihachev, Grigory ; Riemensberger, Johann ; Tian, Hao ; Liu, Junqiu ; Bhave, Sunil A. ; Kippenberg, Tobias J.
Published in 2021 Conference On Lasers And Electro-Optics (Cleo)
Series Conference on Lasers and Electro-Optics
Conference Conference on Lasers and Electro-Optics (CLEO), May 09-14, 2021, ELECTR NETWORK
Date 2021-01-01
Publisher New York, IEEE
ISSN 2160-9020
ISBN 978-1-943580-91-0
DOI https://doi.org/10.1364/CLEO_SI.2021.STu4D.7
Other identifier(s) View record in Web of Science
Laboratories LPQM
Record Appears in Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > LPQM - Laboratory of Photonics and Quantum Measurements (STI/SB)
Scientific production and competences > SB - School of Basic Sciences > IPHYS - Institute of Physics > LPQM - Laboratory of Photonics and Quantum Measurements (STI/SB)
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Record creation date 2022-09-12