Formation of nano-sized silicon powders from silicon clusters in a silane plasma


Editor(s):
Mathieu, H. J.
Reihl, B.
Briggs, D.
Published in:
ECASIA95: 6th European Conference on Applications of Surface & Interface Analysis, 483-486
Presented at:
6th European Conference on Applications of Surface & Interface Analysis, Montreux, October 9-13, 1995
Year:
1996
Publisher:
Chichester and New York, Wiley & Sons
ISBN:
0-471-95899-9
Laboratories:




 Record created 2005-01-12, last modified 2018-03-17


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