CONTINUOUSLY TUNABLE SILICON PHOTONIC MEMS 2 x 2 POWER COUPLER
The integration of MEMS transducers in photonic integrated circuits provides opportunities for high efficiency photonic modulation and dynamic routing on-chip. We here present an electrostatically actuated, silicon photonic MEMS 2 x 2 power coupler, fabricated in IMEC's iSiPP50G platform followed by a dedicated MEMS release sequence. The in-plane, mechanical tuning mechanism provides analog power coupling between waveguides in a small form factor. With our experimental demonstration of broad, > 30 nm optical bandwidth, high extinction ratio of > 27 dB, and a low actuation voltage of only 6 V, the coupler fulfills the requirements for large-scale integration in next generation reconfigurable PICs.
WOS:000707041600121
2021-01-01
978-0-7381-2562-6
New York
International Solid-State Sensors Actuators and Microsystems Conference
447
450
REVIEWED
Event name | Event place | Event date |
ELECTR NETWORK | Jun 20-25, 2021 | |