Two-dimensional (2D) lattices of diffusively coupled chaotic oscillators are studied. In previous work, it was shown that various cluster synchronization regimes exist when the oscillators are identical. Here, analytical and numerical studies allow us to conclude that these cluster synchronization regimes persist when the chaotic oscillators have slightly different parameters. In the analytical approach, the stability of almost-perfect synchronization regimes is proved via the Lyapunov function method for a wide class of systems, and the synchronization error is estimated. Examples include a 2D lattice of nonidentical Lorenz systems with scalar diffusive coupling. In the numerical study, it is shown that in lattices of Lorenz and Rössler systems the cluster synchronization regimes are stable and robust against up to 10%–15% parameter mismatch and against small noise.