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Details
Title
Optimisation of mask fabrication for DUV Lithography
Author(s)
Douat, Romain
Advisor(s)
Date
2021-01-01
Laboratories
NEMS
Record Appears in
Scientific production and competences > STI - School of Engineering > IGM - Institute of Mechanical Engineering > NEMS - Advanced Nano-electromechanical Systems Laboratory
Student projects
Student projects
Work type
Semester assignment
Record creation date
2021-05-17