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conference paper
Co-Sputtered Monocrystalline GeSn for Infrared Photodetection
August 6, 2020
Proceedings of the 2020 IEEE Photonics Society Summer Topicals Meeting Series (SUM)
We demonstrate monocrystalline growth of GeSn on Ge and Si substrates by co-sputtering. We discuss the evolution of film growth with thickness, elucidating the effects of substrate temperature, sputtering source, and the importance of hydrogen dilution in the plasma.
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Type
conference paper
Publication date
2020-08-06
Publisher
Published in
Proceedings of the 2020 IEEE Photonics Society Summer Topicals Meeting Series (SUM)
ISBN of the book
978-1-728158-87-7
Series title/Series vol.
2020 IEEE Photonics Society Summer Topicals Meeting Series (SUM)
Start page
1
End page
2
Peer reviewed
REVIEWED
Event name | Event place | Event date |
Online conference | July 13-15, 2020 | |
Available on Infoscience
February 19, 2021