Co-Sputtered Monocrystalline GeSn for Infrared Photodetection
2020
Abstract
We demonstrate monocrystalline growth of GeSn on Ge and Si substrates by co-sputtering. We discuss the evolution of film growth with thickness, elucidating the effects of substrate temperature, sputtering source, and the importance of hydrogen dilution in the plasma.
Details
Title
Co-Sputtered Monocrystalline GeSn for Infrared Photodetection
Author(s)
Giunto, Andrea ; Humblot, Nicolas ; Burnier, Luc ; Krammer, Anna ; Schuler, Andreas ; Fontcuberta i Morral, Anna
Published in
Proceedings of the 2020 IEEE Photonics Society Summer Topicals Meeting Series (SUM)
Series
2020 IEEE Photonics Society Summer Topicals Meeting Series (SUM)
Pages
1-2
Conference
2020 IEEE Photonics Society Summer Topicals Meeting Series (SUM), Online conference, July 13-15, 2020
Date
2020-08-06
Publisher
IEEE
ISBN
978-1-728158-87-7
Keywords
Record Appears in
Scientific production and competences > ENAC - School of Architecture, Civil and Environmental Engineering > IIC - Civil Engineering Institute > LESO-PB - Solar Energy and Building Physics Laboratory
Scientific production and competences > STI - School of Engineering > IMX - Institute of Materials > LMSC - Laboratory of Semiconductor Materials
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Scientific production and competences > STI - School of Engineering > IMX - Institute of Materials > LMSC - Laboratory of Semiconductor Materials
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Record creation date
2021-02-19