Freestanding Silicon Photonic Ring and Disk Resonators

We report freestanding silicon photonic ring and disk resonators fabricated in a simplified silicon photonics process based on IMEC's iSiPP5OG standard platform that have been released by a custom MEMS post-processing step. Experimental results show high optical Q-factors up to 3.6x10(4) for both ring and disk resonators, and extinction ratios larger than 20 dB. These functional, freestanding resonators demonstrate the compatibility of MEMS processing within a silicon photonics platform and open the possibility for large-scale integration of more complex photonic devices.


Published in:
2019 International Conference On Optical Mems And Nanophotonics (Omn), 212-213
Presented at:
International Conference on Optical MEMS and Nanophotonics (OMN), Daejeon, SOUTH KOREA, Jul 28-Aug 01, 2019
Year:
Jan 01 2019
Publisher:
New York, IEEE
ISSN:
2160-5033
ISBN:
978-1-7281-4503-7
Keywords:
Laboratories:




 Record created 2020-04-12, last modified 2020-04-20


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