MEMS-Enabled Silicon Photonic Integrated Devices and Circuits

Photonic integrated circuits have seen a dramatic increase in complexity over the past decades. This development has been spurred by recent applications in datacenter communications and enabled by the availability of standardized mature technology platforms. Mechanical movement of wave-guiding structures at the micro- and nanoscale provides unique opportunities to further enhance functionality and to reduce power consumption in photonic integrated circuits. We here demonstrate integration of MEMS-enabled components in a simplified silicon photonics process based on IMEC's Standard iSiPP50G Silicon Photonics Platform and a custom release process.


Publié dans:
Ieee Journal Of Quantum Electronics, 56, 1, 8400210
Année
Feb 01 2020
Publisher:
Piscataway, IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
ISSN:
0018-9197
1558-1713
Mots-clefs:
Laboratoires:




 Notice créée le 2020-03-03, modifiée le 2020-04-20


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