Single crystalline diamond part production method for stand alone single crystalline mechanical and optical component production

The present invention relates to a free-standing single crystalline diamond part and a single crystalline diamond part production method. The method includes the steps of: - providing a single crystalline diamond substrate or layer; - providing a first adhesion layer on the substrate or layer; - providing a second adhesion layer on the first adhesion layer: - providing a mask layer on the second adhesion layer; - forming at least one indentation or a plurality of indentations through the mask layer and the first and second adhesion layers to expose a portion or portions of the single crystalline diamond substrate or layer; and - etching the exposed portion or portions of the single crystalline diamond substrate or layer and etching entirely through the single crystalline diamond substrate or layer.


Year:
2019
Keywords:
Note:
Alternative title(s) : (fr) Procédé de production de pièce en diamant monocristallin pour la production d'un composant mécanique et optique monocristallin autonome
Other identifiers:
EPO Family ID: 60081103
Laboratories:




 Record created 2019-12-05, last modified 2020-08-10


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