A method for quantitative nanoscale imaging of dopant distributions using secondary ion mass spectrometry: an application example in silicon photovoltaics
Eswara, Santhana; Pshenova, Alisa; Lentzen, Esther; Nogay, Gizem; Lehmann, Mario; Ingenito, Andrea; Jeangros, Quentin; Haug, Franz-Josef; Valle, Nathalie; Philipp, Patrick; Hessler-Wyser, Aicha; Wirtz, Tom
2019

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Abstract

A method for rapid quantitative imaging of dopant distribution using secondary ion mass spectrometry (SIMS) is described. The method is based on SIMS imaging of the cross-section of a reference sample with a known concentration profile. It is demonstrated for the case of boron quantification in silicon in a SIMS imaging mode. A nonlinear relationship between the secondary ion intensity and the concentration is observed. A detection limit of 3 (+/- 2) x 10(17) at./cm(3) (similar to 6 ppm) is determined with 39 nm pixel-size for the used experimental conditions. As an application example, a boron concentration profile in a passivating contact deposited on a textured Si surface is analyzed.

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Title A method for quantitative nanoscale imaging of dopant distributions using secondary ion mass spectrometry: an application example in silicon photovoltaics
Author(s) Eswara, Santhana ; Pshenova, Alisa ; Lentzen, Esther ; Nogay, Gizem ; Lehmann, Mario ; Ingenito, Andrea ; Jeangros, Quentin ; Haug, Franz-Josef ; Valle, Nathalie ; Philipp, Patrick ; Hessler-Wyser, Aicha ; Wirtz, Tom
Published in Mrs Communications
Volume 9
Issue 3
Pages 916-923
Date 2019-09-01
ISSN 2159-6859
2159-6867
Keywords
Note This is an open access article under the terms of the Creative Commons Attribution License
DOI https://doi.org/10.1557/mrc.2019.89
Other identifier(s) View record in Web of Science
Laboratories PV-LAB
Record Appears in Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > PV-LAB - Photovoltaics and Thin Film Electronics Laboratory
Scientific production and competences > EPFL Partners > Neuchâtel Campus > PV-Lab - Photovoltaics and Thin Film Electronics Laboratory
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Record creation date 2019-10-17

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