Advanced Sensor Systems by Low-Temperature Heterogeneous 3D Integration Processes
2018
Abstract
A few application demonstrators of heterogeneous 3D integrated systems including innovative nanosensors for gas detection and biofludic applications have been successfully implemented showing efficient low-temperature heterogeneous integration processes, miniaturization, low power consumption, extremely low detection limits (5 ppm) and novel functionalities very interesting for smart sensors in automotive and healthcare applications.
Details
Title
Advanced Sensor Systems by Low-Temperature Heterogeneous 3D Integration Processes
Author(s)
Fernandez-Bolanos, Montserrat ; Muller, Andrei ; Weber, Josef ; Ramm, Peter
Published in
2018 Symposium On Design, Test, Integration & Packaging Of Mems And Moems (Dtip)
Conference
20th Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS (DTIP), Roma, ITALY, May 22-25, 2018
Date
2018-01-01
Publisher
New York, IEEE
ISBN
978-1-5386-6199-4
Keywords
Other identifier(s)
View record in Web of Science
Laboratories
NANOLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > NANOLAB - Nanoelectronic Devices Laboratory
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Record creation date
2019-06-18