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Growth, Integration, and Functional Characterization of AlScN Thin Films for RF MEMS Devices
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Growth, Integration, and Functional Characterizati[...]
-
Parsapour, Fazel
- 9188
Main
file(s):
EPFL_TH9188
version 1
EPFL_TH9188.pdf
[30.99 MB]
25 Feb 2021, 09:09