Characterization of crystallographically etched single crystal diamond diffraction gratings

We report on the fabrication and experimental characterization of single crystal diamond diffraction gratings fabricated with crystallographic dry etching. High aspect ratio atomic force microscopy reveals a characteristic V-groove profile exhibiting smooth sidewalls with an angle of 57 degrees. The discrepancy compared to the (111) crystal plane angle of 54.7 degrees can be explained by a directional isotropic etch contribution, which we confirm by etch process modelling based on the continuous automata method. The optical flatness of the diffraction gratings is measured using interferometry and better than lambda/2.


Published in:
2018 International Conference On Optical Mems And Nanophotonics (Omn), 173-174
Presented at:
International Conference on Optical MEMS and Nanophotonics (OMN), Lausanne, SWITZERLAND, Jul 29-Aug 02, 2018
Year:
Jan 01 2018
Publisher:
New York, IEEE
ISSN:
2160-5033
ISBN:
978-1-5090-6374-1
Keywords:
Laboratories:




 Record created 2019-01-23, last modified 2019-08-12


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