000261929 001__ 261929
000261929 005__ 20190619220105.0
000261929 022__ $$a1057-7157
000261929 022__ $$a1941-0158
000261929 02470 $$a000451944800021$$2isi
000261929 0247_ $$a10.1109/JMEMS.2018.2871657$$2doi
000261929 037__ $$aARTICLE
000261929 245__ $$aHigh Performance, Continuously Tunable Microwave Filters Using MEMS Devices With Very Large, Controlled, Out-of-Plane Actuation
000261929 260__ $$c2018$$aPiscataway$$bIEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
000261929 269__ $$a2018-12-01
000261929 336__ $$aJournal Articles
000261929 520__ $$aSoftware defined radios (SDR) in the microwave X- and K-bands offer the promise of low cost, programmable operation with real-time frequency agility. However, the real world in which such radios operate requires them to be able to detect nanowatt signals in the vicinity of 100 kW transmitters. This imposes the need for selective RF filters on the front end of the receiver to block the large, out of band RF signals so that the finite dynamic range of the SDR is not overwhelmed and the desired nanowatt signals can be detected and digitally processed. This is currently typically done with a number of narrow band filters that are switched in and out under program control. What is needed is a small, fast, wide tuning range, high Q, and low loss filter that can continuously tune over large regions of the microwave spectrum. In this paper, we show how extreme throw MEMS actuators can be used to build such filters operating up to 15 GHz and beyond. The key enabling attribute of our MEMS actuators is that they have large, controllable, and out-of-plane actuation ranges of a millimeter or more. In a capacitance-post loaded cavity filter geometry, this gives sufficient precisely controllable motion to produce widely tunable devices in the 4-15 GHz regime.
000261929 650__ $$aEngineering, Electrical & Electronic
000261929 650__ $$aNanoscience & Nanotechnology
000261929 650__ $$aInstruments & Instrumentation
000261929 650__ $$aPhysics, Applied
000261929 650__ $$aEngineering
000261929 650__ $$aScience & Technology - Other Topics
000261929 650__ $$aInstruments & Instrumentation
000261929 650__ $$aPhysics
000261929 6531_ $$amicroactuator
000261929 6531_ $$atubable filters
000261929 6531_ $$amicrowave filter
000261929 6531_ $$arf mems
000261929 700__ $$aChang, Jackson
000261929 700__ $$aHolyoak, Michael J.
000261929 700__ $$aKannell, George K.
000261929 700__ $$aBeacken, Marc
000261929 700__ $$g254884$$0249018$$aImboden, Matthias
000261929 700__ $$aBishop, David J.
000261929 773__ $$k6$$j27$$q1135-1147$$tJournal Of Microelectromechanical Systems
000261929 8560_ $$fherbert.shea@epfl.ch
000261929 909C0 $$pIMT$$0252713
000261929 909CO $$ooai:infoscience.epfl.ch:261929$$particle$$pSTI
000261929 910C0 $$0252107$$zMarselli, Béatrice$$mherbert.shea@epfl.ch$$xU10955$$pLMTS$$yDeclined
000261929 961__ $$afantin.reichler@epfl.ch
000261929 973__ $$aEPFL$$sPUBLISHED$$rREVIEWED
000261929 980__ $$aARTICLE
000261929 980__ $$aWoS
000261929 981__ $$aoverwrite