000261661 001__ 261661
000261661 005__ 20190619220100.0
000261661 022__ $$a1531-1309
000261661 022__ $$a1558-1764
000261661 02470 $$2isi$$a000443836300019
000261661 0247_ $$a10.1109/LMWC.2018.2854961$$2doi
000261661 037__ $$aARTICLE
000261661 245__ $$aA Reconfigurable Inductor Based on Vanadium Dioxide Insulator-to-Metal Transition
000261661 269__ $$a2018-09-01
000261661 260__ $$c2018-09-01
000261661 336__ $$aJournal Articles
000261661 520__ $$aThis letter introduces a reconfigurable planar square-coil-shaped inductor exploiting as the tuning mechanism the insulator-to-metal transition (IMT) of a vanadium dioxide (VO2) switch placed in the interwinding space in an unprecedented manner. The VO2 thin-film bar-shaped switch is electrically connected to provide a temperature-selective current path that effectively short-circuits a part of the inductor coil changing the inductance of the device. The inductor is fabricated on a high-resistivity silicon substrate using a CMOS-compatible 2-D planar low-cost technology (four photolithography steps). The design, optimized to work in the 4-10-GHz range, provides measured inductances at 5 GHz of 2.1 nH at 20 degrees C and 1.35 nH at 100 degrees C with good stability in the entire frequency band (4-10 GHz) resulting in a reconfiguration ratio of 55%. The quality factor (Q-factor) at 7 GHz is about 8 at 20 degrees C (off state) and 3 at 100 degrees C (on state), outperforming tunable inductors employing VO2 with 2 orders of magnitude higher Q-factor and a smaller footprint. This represents an advancement for the state of the art of 2-D CMOS-compatible inductors in the considered frequency range.
000261661 650__ $$aEngineering, Electrical & Electronic
000261661 650__ $$aEngineering
000261661 6531_ $$ac-band
000261661 6531_ $$ainductors
000261661 6531_ $$ak-band
000261661 6531_ $$areconfigurable inductors
000261661 6531_ $$athin films
000261661 6531_ $$avanadium dioxide (vo2)
000261661 6531_ $$aquality factor
000261661 6531_ $$aswitch
000261661 6531_ $$acpw
000261661 700__ $$g213975$$aCasu, Emanuele Andrea$$0247224
000261661 700__ $$g289348$$aMuller, Andrei A.$$0251162
000261661 700__ $$g276527$$aCavalieri, Matteo$$0250668
000261661 700__ $$aFumarola, Alessandro
000261661 700__ $$0241430$$aIonescu, Adrian Mihai$$g122431
000261661 700__ $$aFernandez-Bolanos, Montserrat
000261661 773__ $$q795-797$$k9$$j28$$tIeee Microwave And Wireless Components Letters
000261661 8560_ $$fandrei.muller@epfl.ch
000261661 8564_ $$uhttps://infoscience.epfl.ch/record/261661/files/LMWC2854961.pdf$$s665349
000261661 909CO $$qGLOBAL_SET$$pSTI$$particle$$ooai:infoscience.epfl.ch:261661
000261661 909C0 $$zMarselli, Béatrice$$xU10328$$pNANOLAB$$memanuele.casu@epfl.ch$$0252177
000261661 961__ $$afantin.reichler@epfl.ch
000261661 973__ $$sPUBLISHED$$aEPFL$$rREVIEWED
000261661 981__ $$aoverwrite
000261661 980__ $$aARTICLE