Theoretical study of an electrostatically actuated torsional microsensor for biological applications

We develop an analytical formulation to calculate the induced resonance frequency shifts of an electrostatically actuated torsional microsensor due to an added bio-mass (E. coli). Based on a lumped-parameter model, we investigate the static and the linear eigenvalue problem of the torsional microsensor. The added mass is modeled as a point mass load placed on different locations along the x-axis of the microsensor. A closed-form expression is determined to calculate the frequency shift under a DC voltage as a function of the added mass. Finite Element Analysis (FEA) results show good agreement with the analytical approach.


Publié dans:
Microsystem Technologies-Micro-And Nanosystems-Information Storage And Processing Systems, 24, 2, 1109-1114
Année
Feb 01 2018
Publisher:
New York, SPRINGER
ISSN:
0946-7076
1432-1858
Mots-clefs:
Laboratoires:
STI




 Notice créée le 2018-11-14, modifiée le 2019-03-02


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