Bouchaala, Adam M. S.
Theoretical study of an electrostatically actuated torsional microsensor for biological applications
Microsystem Technologies-Micro-And Nanosystems-Information Storage And Processing Systems
0946-7076
10.1007/s00542-017-3467-9
24
2
1109-1114
We develop an analytical formulation to calculate the induced resonance frequency shifts of an electrostatically actuated torsional microsensor due to an added bio-mass (E. coli). Based on a lumped-parameter model, we investigate the static and the linear eigenvalue problem of the torsional microsensor. The added mass is modeled as a point mass load placed on different locations along the x-axis of the microsensor. A closed-form expression is determined to calculate the frequency shift under a DC voltage as a function of the added mass. Finite Element Analysis (FEA) results show good agreement with the analytical approach.
mass sensor;
oscillators;
Engineering, Electrical & Electronic;
Nanoscience & Nanotechnology;
Materials Science, Multidisciplinary;
Physics, Applied;
Engineering;
Science & Technology - Other Topics;
Materials Science;
Physics;
SPRINGER
New York
2018