261122
20190302131616.0
0946-7076
1432-1858
isi
000423697800029
doi
10.1007/s00542-017-3467-9
ARTICLE
Theoretical study of an electrostatically actuated torsional microsensor for biological applications
New York
SPRINGER
2018
2018-02-01
Journal Articles
We develop an analytical formulation to calculate the induced resonance frequency shifts of an electrostatically actuated torsional microsensor due to an added bio-mass (E. coli). Based on a lumped-parameter model, we investigate the static and the linear eigenvalue problem of the torsional microsensor. The added mass is modeled as a point mass load placed on different locations along the x-axis of the microsensor. A closed-form expression is determined to calculate the frequency shift under a DC voltage as a function of the added mass. Finite Element Analysis (FEA) results show good agreement with the analytical approach.
Engineering, Electrical & Electronic
Nanoscience & Nanotechnology
Materials Science, Multidisciplinary
Physics, Applied
Engineering
Science & Technology - Other Topics
Materials Science
Physics
mass sensor
oscillators
Bouchaala, Adam M. S.
24
2
1109-1114
Microsystem Technologies-Micro-And Nanosystems-Information Storage And Processing Systems
STI
252735
oai:infoscience.epfl.ch:261122
article
STI
EPFL
REVIEWED
PUBLISHED
ARTICLE
WoS