000260252 001__ 260252
000260252 005__ 20181203015540.0
000260252 02470 $$2isi$$a000439429000019
000260252 0247_ $$2doi$$a10.1364/OPTICA.5.000884
000260252 037__ $$aARTICLE
000260252 245__ $$aUltra-smooth silicon nitride waveguides based on the Damascene reflow process: fabrication and loss origins
000260252 269__ $$a2018
000260252 260__ $$c2018
000260252 336__ $$aJournal Articles
000260252 700__ $$aPfeiffer, MHP
000260252 700__ $$aLiu, JQ
000260252 700__ $$aRaja, AS
000260252 700__ $$aMorais, T
000260252 700__ $$aGhadiani, B
000260252 700__ $$aKippenberg, TJ
000260252 773__ $$q884-892$$k7$$j5$$tOPTICA
000260252 909C0 $$xU11831$$xU11892$$0252348$$pLPQM
000260252 909CO $$pSB$$pSTI$$particle$$ooai:infoscience.epfl.ch:260252
000260252 973__ $$aEPFL$$rREVIEWED$$sPUBLISHED
000260252 980__ $$aARTICLE
000260252 980__ $$aWoS