Single ended capacitive self-sensing system for comb drives driven XY nanopositioners
2018
Details
Title
Single ended capacitive self-sensing system for comb drives driven XY nanopositioners
Author(s)
del Corro, PG ; Imboden, M ; Perez, DJ ; Bishop, DJ ; Pastoriza, H
Published in
SENSORS AND ACTUATORS A-PHYSICAL
Volume
271
Pages
409-417
Date
2018
Other identifier(s)
View record in Web of Science
Laboratories
LMTS
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > LMTS - Soft Transducers Laboratory
Scientific production and competences > EPFL Partners > Neuchâtel Campus > LMTS - Soft Transducers Laboratory
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Scientific production and competences > EPFL Partners > Neuchâtel Campus > LMTS - Soft Transducers Laboratory
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Record creation date
2018-11-08