Precision micro-mechanical components in single crystal diamond by deep reactive ion etching
2018
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Title
Precision micro-mechanical components in single crystal diamond by deep reactive ion etching
Author(s)
Toros, A ; Kiss, M ; Graziosi, T ; Sattari, H ; Gallo, P ; Quack, N
Published in
MICROSYSTEMS AND NANOENGINEERING
Volume
4
Pages
12
Date
2018
Publisher
Nature Publishing Group
ISSN
2055-7434
Note
This article is licensed under a Creative Commons Attribution 4.0 International License
Other identifier(s)
View record in Web of Science
Laboratories
Q-LAB
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > Q-LAB - Quack Group
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Record creation date
2018-11-08